Custom Coils, Inc.
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Refurbishing of a Ceramic Dome for the Semiconductor
Manufacturing Industry

Dome Deposition Unclean
Dome Deposition Unclean
Dome Deposition Unclean
Dome Deposition Clean
Dome Deposition Clean
Dome Deposition Clean

A large semiconductor manufacturer inquired if Custom Coils could rework an original bell jar assembly, which had undergone multiple PM cycles, and had a number of mechanical problems. These included a leak at the water fitting locations on the cooling cap, at the top of the dome. In addition, a ground tab on the top coil had grown work hardened and fallen off. Custom Coils performed a complete analysis, and provided a risk assessment to our customer. We identified a series of additional problems, including external arcing at the base of the assembly, as well as potting compound that had been burned beyond repair around the arcing point. Custom Coils stripped the ceramic dome of all its original components and sent the bare dome out to an authorized Ceramics Cleaning Provider, to be vacuum leak tested and grit blast/cleaned to customer supplied surface roughness specifications.

The ceramic dome was returned to Custom Coils in near new condition, and reassembled with all new components. The unit was fully tested, and cleaned (clean room specification). The refurbished assembly was reinstalled on a tool and successfully completed its prescribed wafer run cycle. The positive results of this initial experience gave our customer the confidence to implement a program to restore the utility of many domes which had been stored as unusable inventory.

Many companies have accumulated domes with significant mechanical and ceramic problems. With our extensive background and experience, we can rework these domes to a near new condition, allowing the customer to increase the value of its original investment. For more information on this project, see the table below or contact us directly.

Highlights of this CERAMIC Dome Refurbishment Project

Product Description
Bell Jar Assembly
Dome Refurbishment Capabilities Applied/Processes
Initial:
Visual Inspection, Pressure leak test on all water lines
Vacuum Leak check of sealed surfaces on dome
Recommend to customer

Refurbishment:
Strip dome
Dome surfaces treated - GRIT Blast, ALOX, kiln bake
Reassembly to specification
Clean room compatible treatment
In process testing/inspection performed
Pressure Leak Testing, Vacuum Leak Testing
Surface Roughness
Inductance
Mechanical validation testing
Industry for Use
Semiconductor Manufacturing
Delivery/Turnaround Time
4 weeks
Delivery Location
Hopewell Junction, NY
Standards Met
Customer Specifications, CAD Drawing
Product Name
Ceramic Belljar Dome Assembly