Custom Coils, Inc.
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Ceramic Dome Refurbishment Services

Dome Refurbishment Unfinished
Dome Refurbishment Unfinished
Dome Refurbishment Unfinished
Dome Refurbishment Finished
Dome Refurbishment Finished
Dome Refurbishment Finished

In support of our ceramic belljar dome assembly manufacturing, Custom Coils also provides comprehensive repair and refurbishment services. Since the inception of the first 200MM model, developed in the early 1990's, we have manufactured ceramic dome assemblies of over 15 variations.

The normal life cycle of an belljar dome assembly includes many product maintenance cycles. Over time, critical surfaces of the ceramic dome deteriorate, and the components erode. Our refurbishment service provides for the replacement of all components except the ceramic dome itself. We work closely with Pentagon Technologies (or an authorized ceramics cleaning provider) to treat the dome surfaces (i.e. remove deposition and restore surface roughness requirements, etc.), prior to assembly. The unit is then reassembled, with all new components (i.e. RF coil, cooling caps, non-conductive elastomer, and machine parts) and fully tested.

To learn more about our Belljar Dome refurbishment services, or the processes we employ, see the table below or contact us directly.

Past Projects

Ceramic DOME REFURBISH SERVICE Capabilities

Repair/Refurbish Service
200MM, 300MM Ceramic Belljar Assemblies
Process
Chemical Vapor Deposition
Program
Product Maintenance Cycle
Removed
Strip
Surface Refinishing
Cleaning Ceramic
Reassembled
Quality
100% Part/Process Tracking
Traceability
Testing
Inductance, Pressure/leak check
Vacuum Leak check, Surface Roughness, Mechanical
Components
Cooling/RF Coil
Ceramic Bell Jar
Ground Tabs / Slugs
Machine Parts
Non Conductive Elastomer (grey potting)
Potting Compound
Silicone Based
Non-Conductive
Cleaning Process
Grit Blasting
Kiln Bake
ALOX Clean
Final Clean Room package
Assembly Part Numbers
200MM, 300MM Ceramic Belljar Assemblies
Dome Diameter
18 in
Dome Height
14 in
Dome Wall Thickness
1 in
Coil Wire Diameter
1/4 to 5/16 in
Coil Wrapping
From Bottom to Top
Specification
Surface Roughness
Secondary Services
Bonding
Brazing
Epoxy Encapsulation
Potting
Soldering
Vacuum Casting
Welding
Cable Assembly
Mold Fabrication and Utilization
Precision machining/Tool Development

Additional Information

Industries Served
Semiconductor Equipment Manufacturing
Intended Applications
RF Assemblies
Silicon Wafers
Industry Standards
UL
NEMA
ISO Compliant
File Formats
CAD Capabilities
2D & 3D Modeling
Warranty
4 months