Custom Coils, Inc.
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Coil Forming of a High Power Electro-Magnet used in a Dielectric Etch tool for the Semiconductor Equipment Processing Industry

Dual Cooled Parallel Coils
Dual Cooled Parallel Coils
Dual Cooled Parallel Coils
Dual Cooled Parallel Coils Pic
Dual Cooled Parallel Coils Pic
Dual Cooled Parallel Coils Pic

At Custom Coils, our expertise in coil design and manufacturing, allows us to offer collaborative design solutions which utilize high tech processes, with cutting edge technology. The project highlighted here was developed for a manufacturer of semiconductor processing equipment, who needed an electromagnet for the ionization of plasma on a tool used in the dielectric etching process.

Our support of this client included a co-engineered design effort, and the successful delivery of fully tested prototype units. Collaboration began at the project's inception, and included the creation of solid models, a complex set of drawings and BOMS, and comprehensive test specification.

The electromagnet featured a rectangular shape with bent ends which provides greater field uniformity. It also included the addition of cooling plate assemblies with water channels which were embedded in the center of the magnet. This feature allowed for a constant operating temperature below design threshold. The prototype was manufactured using a number of processes including CNC machining, our coil winding system, a coil bending operation, welding/soldering system, and heat curing using an industrial oven. It also utilized materials such as film insulated magnet wire, high temperature epoxy, various insulating materials, copper plate/copper tube, PTFE coated lead wires, and was finished with Kapton tape.

To ensure the precision and integrity of the prototype units, we employed various quality measures such as custom fabricated test fixtures, and gauges, as well as functionality testing. This high powered electromagnet, was engineered, manufactured, and delivered inside of the 8 week turnover that the customer required.

To learn more about this project, or the processes used to manufacture it, see the table below or contact us directly.

Highlights of this Coil Engineering Manufacturing Project

Product Description
This electromagnet is used for the ionization of plasma on a tool used in the dielectric etch process of Semiconductor processing.
Coil Engineering Manufacturing Capabilities Applied/Processes
Primary:
Engineering
  • Product Development
  • Process Designing
  • Tooling Design
  • Test design

Secondary:
Prototype Manufacturing
Equipment Used to Manufacture Part
CNC Machine
Coil Winding System
Welding/soldering system
Industrial Oven
Overall Part Dimensions
24" x 14"
Tightest Tolerances
±.010"
Material Used
Film insulated magnet wire
High temperature epoxy
Nomex Insulating materials
Copper plate/copper tube
PTFE lead wire
Material Finish
Kapton tape
Features/Benefits
Rectangular shape with bent ends provided greater field uniformity
Cooling Plate assemblies with water channels were embedded in the center of the magnet
  • Maintained a constant operating temperature below design threshold.
In process testing/inspection performed
Test Fixtures, Gauges, Functionality Testing
Thermal sensor
Industry for Use
Semiconductor Equipment Processing Industry
Volume
Prototype
Delivery/Turnaround Time
8 weeks
Delivery Location
Silicon Valley, CA
Standards Met
Customer Specifications
Product Name
Hi Power Electromagnet